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主要应用领域：
IC Bumping、IC载板、IC Lead frame等相关行业；
LED(PSS)、MEMS、SENSOR和ENCODER等精细电子元器件行业。
Applications：
IC Bumping、IC Substrate,IC Lead frame and other related industry；
LED(PSS)、MEMS、SENSOR、ENCODER and other fine components industry.
铬版精度 Chrome Mask Specifications （Standard Size:6inch Quartz)
精度 / 级别
Items / Class |
最高精度
Grade 1 |
高精度
Grade 2 |
中精度
Grade 3 |
一般精度
Grade 4 |
最小线宽/线缝
Min.Line/Space Width |
1.0μm/1.0μm |
3μm/3μm |
5μm/5μm |
10μm/10μm |
线条精度
CD Control |
±0.1μm |
±0.3μm |
±0.5μm |
±1.0μm |
总长精度
Total Pitch Accuracy |
±0.25μm |
±0.5μm |
±0.75μm |
±1.0μm |
图形位置精度
Registration Accuracy |
±0.25μm |
±0.5μm |
±0.75μm |
±1.0μm |
套合精度
Overlay Accuracy |
±0.25μm |
±0.5μm |
±0.75μm |
±1.0μm |
垂直精度
Orthogonality |
±0.5μrad |
±0.75μrad |
±1.0μrad |
±2.0μrad |
铬版材料 Substrate(Photomask blank phate)
| 材料 Material |
Soda Lime Glass、Quartz |
| 常规尺寸Normal Size |
3006,4009,5009,6012,6025,7012,9012,12"x12",14"x14" |
| 厚度 Thickness |
1.5±0.2mm,2.3±0.2mm ,3.0±0.2mm ,4.8±0.2mm
6.35±0.2mm (QZ),8.0±0.2mm (QZ) |
| 铬膜 Film Type |
Low Reflectance Chrome |
光学密度
Optical Density(λ=450nm) |
Between Plates3.0±0.3 In Plate±0.3 |
反射率
Reflectivity(λ=436nm) |
Between Plates10±5% In Plate±2% |
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