800FSA型光刻机系统

 

OAI 800FSA型光刻机是一种半自动化的光学式顶面掩模对准器。它提供超精密（1μm-2μm）对准精度，并设计为以极具竞争力的价格大大超过任何可比的背面Aligner的性能。多功能800FSA型面罩Aligner非常适合用于小批量生产，研发实验室和大学。

800FSA型掩模对准器可以配置多种OAI光源，功率高达2KW。掩模对准器工具可容纳高达8英寸正方形的基板，并且晶片卡盘被定位成允许容易地装载和卸载。这种经济实惠的面罩对齐器具有电动自动调平和自动间隙设置。

建立在振动隔离平台上，固定面罩支架组件保证对准精度和重复性。使用易于读取的PLC触摸屏简化操作。培训时间短;操作者可以在不到一小时内有效地学习使用面罩对准器。

Model 800FSA Topside Mask Aligner System

The OAI Model 800FSA Mask Aligner is a semi-automated, optical Topside mask Aligner. It delivers ultra-precise (1µm-2µm) alignment accuracy and is designed to greatly surpass the performance of any comparable backside Aligner at an extremely competitive price. The versatile Model 800FSA mask Aligner is ideal for use in low volume production, R&D labs, and universities.

The Model 800FSA Mask Aligner can be configured with a wide variety of OAI light sources that range in power up to 2KW. The mask Aligner tooling can accommodate substrates up to 8-inch square, and the wafer chuck is positioned to allow for easy loading and unloading. This cost-effective mask Aligner features motorized auto leveling and auto gap setting.

Built on a vibration isolation platform, the fixed mask holder assembly guarantees alignment accuracy and repeatability. Operation is simplified using the easy-to-read, PLC touch-screen. Training time is short; an operator can learn to use the mask Aligner effectively in less than one hour.