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Spin speed: 0 to 12,000 rpm
0 to 30,000 rpm/s acceleration (unloaded)
Spin speed repeatability: <0.2 rpm
Spin speed resolution: <0.2 rpm
Bi-directional speed control/oscillating chuck
0.1 second resolution for step times (9,999.9 seconds max step time)
Spin-coating Uniformity over 6" diameter wafer <+/-3% (with 3 mm edge
exclusion zone)
Formula: (Highest Value - Lowest Value)/ (Average Value) x (100%) / 2
