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扬州市神州科技有限公司成立于2003年，现有专业技术人员40人, 员工50人, 专业从事射频等离子体电源的维修、维护及销售，主要服务内容包括：为半导体工厂，液晶面板工厂等提供AE, MKS(ENI), DAIHEN, AD-TEC, KYOSAN, RFPP等国际品牌的射频电源、直流电源、匹配器、RPS及各类半导体设备维修、销售、客户方案定制与老式机型替代，并提供现场支持服务。
公司主要客户：TSMC, HYNIX, SMIC, IVO, JCAP, MEMSIC, HHNEC, SZ TIANMA, HEJIAN, JA SOLAR,SONY, TOSHIBA, BEST SOLAR等。
二、产品介绍
GHW-12A / 13.56 MHz / 1250 W 射频电源
| Rated Power Output (into 50 ohm load) |
1250 W |
| Frequency/Stability | 13.56MHz ±0.005% |
| Dynamic Power Range | 10 - 1250W |
| Load Impedance Range | Unlimited |
| RF Stability/Spurious Output | Unconditionally stable for any load within operational limits < -45dBc |
| Harmonic Output & Distortion | < -40dBc |
| Load Mismatch Protection | Automatic; forward power limits typically 0.25ms after reverse power reaches a pre-programmed level≤16% of rated power. |
| Regulation Tolerance | > 125 W: ±1.5% SP < 125 W: ± 3.0 W |
| Primary AC Power Source | 200/208 VAC, 3/PE~ (3W+G) 14 A/PHASE 380/400 VAC, 3/PE~ (3W+G) 7.5 A/PHASE |
| Cooling System | Water flow at 2.0 Gal./Min. (7.6 LPM) minimum at +5°C to +35°C. Connections provided to accept 1/4” male (NPT) pipe thread. |
| Power Readout | Digital readout displays frequency and forward, reflected and load power. |
| Safety Compliance | NRTL Listed: UL3111-1 (1994) CAN/CSA C22.2 No. 1010.1-92 EN61010-1:1993; A2:1995 |
| EMC Compliance | EN50081-2: 1992 EN50082-2: 1995 |
| Weight | 32.5 lbs. (14.8 kg) |
| Dimensions (H x W x D) (excluding handles & connectors) | 3.5” x 19” rack mount x 20.0” (89 x 483 x 508 mm.) |
| Remote Interface Connectors | Standard: RS-232 Subminiature Type-D 9-pin digital; optional custom interface cards available. |
| RF Output Connector | Type N |
| Rack Mounting | EIA (Standard) 19-inch adapters supplied |
更多信息请与我们联系！
三、品质保障
我们所销售的电源、匹配器及RPS等如无特殊说明，均提供6个月的免费保修服务。
我们为销售产品提供终身维修服务，并可提供EXCHANGE服务，保证客户的生产正常进行。
四、运输
我们为所有出厂的机器提供最结实的包装，保证运输过程中机器的安全。
